Specialty & Electronic Gases
We provide a wide range of high-purity Specialty & Electronic Gases to support advanced applications in electronics, semiconductor manufacturing, and precision industries. Our products ensure exceptional performance, reliability, and purity for your critical processes. Partner with us to drive innovation with the following Core Product Lines:
Fluorocarbons - Optimized for plasma etching and chamber cleaning.
CF₄
Carbon Tetrafluoride
CHF₃
Trifluoromethane
C₂F₆
Hexafluoroethane
C₃F₈
Octafluoropropane
C₄F₆
Hexafluoro-1, 3-Butadiene
C₄F₈
Octafluorocyclobutane
SF₆
Sulfur Hexafluoride
NF₃
Nitrogen Trifluoride
Hydrides & Oxides - Enabling epitaxial growth and ion implantation.
SiH₄
Silane
PH₃
Phosphine
AsH₃
Arsine
NH₃
Ammonia
NO
Nitric Oxide
CO
Carbon Monoxide
Hydrocarbons - Calibration Accuracy and Reliable Combustion.
CH₄
Methane
C₂H₂
Acetylene
C₃H₈
Propane
Rare Gases & Mixtures - precision blends for lasers and detectors.
He
Helium
Kr
Krypton
Xe
Xenon
Lithography Gases - excimer blends – stable wavelength control for DUV/EUV.
1.25%Kr
Ne(balance)
3.5%Ar/10ppmXe
Ne(balance)
0.95%F₂/1.25%Kr
Ne(balance)
0.95%F₂/3.5%Ar
Ne(balance)
Packaging Options
Cylinders | Pallets | Y-Cylinders | Drums |
MicroBulk Tanks | ISO Tanks | Tube Trailer
